Tag: Microfabrication

Free Download Sami Franssila, "Introduction to Microfabrication"
English | 2010 | ISBN: 0470749830 | PDF | pages: 509 | 34.1 mb
This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered.

Free Download Electro-Micromachining and Microfabrication
by Sandip Kunar
English | 2024 | ISBN: 1774913798 | 432 pages | True PDF | 28.2 MB

Free Download The Physics of Microfabrication by Ivor Brodie , Julius J. Muray
English | PDF | 1982 | 518 Pages | ISBN : 0306408635 | 39.4 MB
The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite the relatively small size of our research activity. We have frequently been asked to deliver seminars or provide reviews on various aspects of micro fabrication. These activities made us aware of the need for a comprehensive overview of the physics of microfabrication. We hope that this book will fill that need.

Free Download Marc J. Madou, "Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set Ed 3"
English | ISBN: 0849331803 | 2011 | 1992 pages | PDF | 67 MB
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options.